JPH0220110U - - Google Patents
Info
- Publication number
- JPH0220110U JPH0220110U JP9865288U JP9865288U JPH0220110U JP H0220110 U JPH0220110 U JP H0220110U JP 9865288 U JP9865288 U JP 9865288U JP 9865288 U JP9865288 U JP 9865288U JP H0220110 U JPH0220110 U JP H0220110U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- wafer chuck
- moves
- wafer
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003550 marker Substances 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9865288U JPH0220110U (en]) | 1988-07-26 | 1988-07-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9865288U JPH0220110U (en]) | 1988-07-26 | 1988-07-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0220110U true JPH0220110U (en]) | 1990-02-09 |
Family
ID=31325116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9865288U Pending JPH0220110U (en]) | 1988-07-26 | 1988-07-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220110U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013015323A (ja) * | 2011-06-30 | 2013-01-24 | Ulvac Japan Ltd | 膜厚測定装置及び膜厚測定方法 |
-
1988
- 1988-07-26 JP JP9865288U patent/JPH0220110U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013015323A (ja) * | 2011-06-30 | 2013-01-24 | Ulvac Japan Ltd | 膜厚測定装置及び膜厚測定方法 |
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